Manufacturer: EVG
Model: Gemini
Vintage: 2014
Condition: used
Refurbishment, warranty, installation, training, service and support available
Available for full inspection and demonstration
Fully automated operation
Interlocked doors with signal light tower
4 Axis Industrial Robot
EVG CIM Framework Software GUI (Graphical User Interface)
Flexible process flow definition
Drag and drop recipe programming
Parallel processing of multiple jobs
Automated recording of process and machine parameters
Throughput optimized handling sequence
Password protected user access levels
Open cassette loading with empty/present sensor
Wafer size: up to 8"/200mm
Tooling included: 8” bond chucks (additional tooling can be offered)
SmartView®NT Alignment Module with 5x Objectives
4 Bond modules with up to 550°C and 20kN bond force
Formic Acid Bubbler option for purging formic acid vapor into bond chamber
1 purge gas line for process gas
CE Certified
All system documentation

Item ID: LES-9005